If you’re stack height sensitive, you have to go somewhere between the XTR and XT pedal.
Note that Favero measures stack height differently; they advertise 11.2mm, which is lower than the advertised 15.1mm for the XTR, but in reality, XTR is about 0.7mm lower in my measurement.
XT is supposedly 1.4mm taller than the XTR per Shimano, which would give you +0.7mm taller than the PRO MX. M540 is another 0.5mm on top of that.
Q factors I did not measure, but are less of an issue because you can actually adjust with pedal spacers.
Note that my measurements are relative since I’m measuring to the shoe tread.

